High-Q silicon optomechanical microdisk resonators at gigahertz frequencies
نویسندگان
چکیده
منابع مشابه
Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics.
We report the fabrication and experimental characterization of an ultra-high Q microdisk resonator in a silicon-on-insulator (SOI) platform. We examine the role of the substrate in the performance of such microdisk resonators. While substrate leakage loss has warranted the necessity of substrate undercut structures in the past, we show here that the substrate has a very useful role to play for ...
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Xiyuan Lu, Jonathan Y. Lee, Philip X.-L. Feng, and Qiang Lin Department of Physics and Astronomy, University of Rochester, Rochester, New York 14627, USA Department of Electrical and Computer Engineering, University of Rochester, Rochester, New York 14627, USA Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio 44106, USA Institute of Opti...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2012
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.4709416